Comparison of infrared frequency selective surfaces fabricated by direct-write electron-beam and bilayer nanoimprint lithographies

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Comparison of infrared frequency selective surfaces fabricated by direct-write electron-beam and bilayer nanoimprint lithographies

We report on the fabrication of crossed-dipole resonant filters by direct-write electron-beam and nanoimprint lithographies. Such structures have been used as spectrally selective components at visible, microwave, and infrared wavelengths. Imprinting is accomplished in a modified commercial hot press at 155 °C. The replica is then etched in oxygen plasma and developed in chlorobenzene to select...

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ژورنال

عنوان ژورنال: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

سال: 2000

ISSN: 0734-211X

DOI: 10.1116/1.1319838